Brightfield vs Darkfield Microscopy for Wafer Inspection: Which Method Detects Semiconductor Defects Better?
Introduction Semiconductor wafer inspection depends heavily on optical contrast. Even with high-resolution optics, the ability to detect particles, scratches, edge chips, and pattern defects often comes down to one critical factor: illumination method. Among reflected-light inspection techniques, brightfield microscopy and darkfield microscopy remain two of the most widely used methods for wafer inspection because each […]